Axcelis Changes Time of Fourth Quarter and Year-End Conference Call and Live Webcast

January 13, 2003 at 8:20 AM EST

BEVERLY, Mass.--(BUSINESS WIRE)--Jan. 13, 2003--Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced that the company will be hosting a conference call on Thursday, January 23, 2003, beginning at 6:00 p.m. EST. The purpose of the call is to discuss fourth quarter and year-end results and to provide guidance for the first quarter of 2003.

The call will be available to interested listeners via an audio webcast that can be accessed through Axcelis' home page at www.axcelis.com, or by dialing 1-800-915-4836 (1-973-317-5319 outside North America). Participants calling into the conference call will be requested to provide the company name: Axcelis Technologies, the conference leader: Mark Namaroff, and pass code: Axcelis 4Q. A telephone replay will be available from 9:00 pm EST on January 23, 2003 until 5:00 pm EST on January 30, 2003. Dial 1-800-428-6051 (1-973-709-2089 outside North America), and enter conference ID code #272877. A webcast replay will be available from 8:00 p.m. EST on January 23, 2003 until 5:00 p.m. EST February 23, 2003.

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis Technologies has key technology centers in Beverly, Massachusetts, and Rockville, Maryland as well as in Toyo, Japan through its joint venture, SEN. The company's Internet address is: www.axcelis.com.

CONTACT:

Axcelis Technologies, Inc.
Maureen Hart, 978/787-4273 (Company Contact)
maureenhart@axcelis.com
or
Axcelis Technologies, Inc.
Mark Namaroff, 978/787-4000 (Investor Contact)
investor.relations@axcelis.com
or
Loomis Group
Stacy Grisinger, 617/638-0022 (Agency Contact)
grisingers@loomisgroup.com