Axcelis Introduces MC3 for 300 mm Medium Current Ion Implantation; Production Proven Platform Designed for Low Risk Transition to 300 mm Production

BEVERLY, Mass.--(BUSINESS WIRE)--Nov. 6, 2000--Axcelis Technologies, Inc. (NASDAQ: ACLS), formerly Eaton Semiconductor Equipment Operations, today introduced the MC3 medium current ion implanter for 300 mm semiconductor manufacturing. Rounding out the company's medium current product line, the MC3 is a production ready system designed to be exceptionally versatile, dependable and able to meet both existing and emerging manufacturing requirements. The product is the result of a joint development with Axcelis Technologies' joint venture, Sumitomo Eaton Nova, and has already been shipped to several companies in Japan.

"The production proven design of the MC3, an evolution of the successful 8250HT, provides a low-risk transition to 300 mm manufacturing," said Mary Puma, president and chief operating officer for Axcelis. "Customers who have developed processes on Axcelis' production-proven 200 mm platforms will enjoy the same benefits at 300 mm - with minimal risk, maximum productivity, high reliability, low cost of ownership, advanced automation, and a high degree of system commonality."

Axcelis' 300 mm equipment offering provides customers with a complete line of 300 mm implant tools built on a foundation of existing, production-proven 200 mm technology. The powerful, three product set includes the MC3 for medium current, the HC3 for high current/low energy and the HE3 for high energy applications. The platform suite utilizes both single and multi wafer designs, to ensure both exceptional productivity and robust process performance. The 300 mm implant family covers the entire implant application range, delivering superior process performance for advanced device manufacturing. Extendible for several technology nodes - from 0.25 micron down to 0.10 um, these new implanters provide a high degree of manufacturing flexibility for maximum return on your investment.

About the MC3

The Axcelis MC3 is a fully automated, serial processing medium current implanter. Its production-proven design, an evolution of the 8250HT, minimizes the risk associated with transitioning to 300 mm. A key feature of the MC3 is the Angular Energy Filter, which delivers superior beam purity over the entire energy range of 5 to 750 keV - for superior processing capability and enhanced device yield. The patented Angular Energy Filter also offers the capability to process Indium and other species on the same system. Thus, it eliminates the need for a dedicated implanter and adds a great deal of flexibility to the production environment. The MC3 also utilizes a patented Constant Focal Length wafer scanning system that keeps the ion beam's focal point equidistant at all points across the wafer, regardless of the chosen tilt angle. The result is exceptional uniformity and beam parallelism performance for high-tilt implants.

A powerful multi-tasking control system is designed to deliver superior CoO and OEE performance in a production environment. The system allows uninterrupted production while editing recipes, accessing data or communicating with factory host systems. An integrated statistical process control capability provides exceptional control and allows for rapid yield optimization.

The MC3 is targeted at a number of traditional and emerging medium current applications including: super steep retrograde channel profiles (SSR), Vt adjusts, punch through stoppers, high tilt implants, and retrograde well applications.

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity manufacturing solutions for the semiconductor industry. Axcelis is dedicated to the design and manufacture of high current, medium current and high energy ion implantation equipment, rapid thermal processing systems, photostabilization and photoresist stripping equipment. Axcelis Technologies has manufacturing facilities in Beverly and Rockville, Maryland, as well as in Toyo, Japan through its joint venture Sumitomo Eaton Nova. The company's Internet address is: http://www.axcelis.com.

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