Axcelis Introduces Optima XE Single Wafer High Energy Ion Implanter

Strengthens high energy leadership position with new tool, completing the Optima single wafer product family

BEVERLY, Mass.--(BUSINESS WIRE)--Nov. 29, 2007--Axcelis Technologies, Inc. (NASDAQ: ACLS) today introduced the new Optima XE high energy ion implanter, the final component of Axcelis' Optima single wafer suite of tools. The Optima XE, which is available for shipment, provides a complete range of energy levels from 10keV to 4MeV. Its inherent flexibility and broad energy range allow a single tool to support chipmakers' dynamic high energy requirements for DRAM, NAND and NOR FLASH, embedded memory and logic device manufacturing.

"Axcelis has long been the principal supplier of high energy implant equipment with over 550 tools in production worldwide and at least 80% market share since 1996. The Optima XE positions us to extend our leading high energy position," said Mary Puma, chairman and CEO of Axcelis. "Furthermore, this marks the completion of our Optima tool suite, allowing us to meet the industry's full range of implant needs with equipment that provides excellent performance and productivity."

The Optima XE combines Axcelis' production-proven RF Linac high energy, spot beam technology with a high-speed, state-of-the-art single wafer endstation, enabling unmatched throughput. Axcelis' advanced spot beam ensures that all points across the wafer see the same beam at the same angle, resulting in exceptional process control and maximum yield. Axcelis is also introducing the Optima HE, a reduced energy version of the implanter.

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation and cleaning systems. Axcelis also licenses its 50% owned joint venture, SEN Corporation, an SHI and Axcelis Company, to manufacture and sell certain implant products in Japan. The company's Internet address is: www.axcelis.com.

CONTACT: Company Contact:
Axcelis Technologies, Inc.
David Snyder, 1-978-787 4273
Fax: +1 (978) 787 4275
david.snyder@axcelis.com
or
Investor Contact:
Axcelis Technologies, Inc.
Stephen Bassett, 1-978-787 4000
Fax: +1 (978) 787 9133
investor.relations@axcelis.com
or
Agency Contact:
Loomis Group
Heather Smith, 1-617-309 8005
Fax: +1 (617) 638 0033
smithh@loomisgroup.com

SOURCE: Axcelis Technologies, Inc.