Axcelis Launches RapidCure CE Advanced Charge Erase Technology

Industry's fastest charge erase system for 300mm boosts manufacturing sort yield, enabling makers of advanced discrete and embedded flash meet growing market demand

BEVERLY, Mass.--(BUSINESS WIRE)--Dec. 5, 2006--Axcelis Technologies, Inc., (Nasdaq: ACLS) today introduced RapidCure CE for 300mm device manufacturing. The fastest UV charge erase technology on the market, the RapidCure CE not only cuts erase times up to a factor of 10X but delivers a more complete erase compared to conventional erase technologies. This enables makers of flash and other non-volatile memory chips to significantly boost yield and reduce operating costs. The first 300mm RapidCure CE shipped as part of a multiple tool order to a leading flash manufacturer in November.

Electrical charge build-up occurs during normal semiconductor fabrication with the use of plasma-assisted, ion-assisted and thermal annealing processes, but it can damage device structures and reduce wafer yields if left unchecked. And, on flash devices, accumulated charge in the floating gate must be neutralized prior to final test to help establish sort yields. In all cases, it's become progressively harder to quickly and effectively erase stored charge as device geometries have continued to shrink, film stacks increase in complexity and novel materials are introduced into the device structure.

To address this challenge, Axcelis designed the RapidCure CE with proprietary, high-intensity UV light sources configured with uniquely tuned spectra and precision optics, process-specific chamber controls and programmable wafer heating. This combination allows for rapid and complete neutralization of charge build-up in an automated, single-step process that does not induce device damage. The RapidCure CE technology offers the industry's most flexible chare erasure solution for both front- and back-end-of-line device manufacturing environments.

"As the demand in the flash market intensifies, customers must continue to maximize fab productivity and yield," said Mary Puma, chairman and CEO of Axcelis. "We're pleased to offer the industry's first 300mm advanced charge erasure solution, providing our customers with a highly productive, cost effective solution for next generation device manufacturing."

Axcelis is the recognized leader in the semiconductor industry for UV curing technologies. The company's proprietary UV lamp design and in-house bulb manufacturing capabilities enable Axcelis to tailor processes to each customer's application need. Axcelis offers three configurations of the RapidCure system, including the RapidCure CE, RapidCure FC and RapidCure PS, to give customers the flexibility to cover a broad range of charge erase, film curing and photostabilization applications.

Axcelis representatives will be available to discuss RapidCure CE and other UV-based curing products and applications during SEMICON Japan on December 6-8. Interested parties are invited to stop by the Axcelis booth, #3A-301, at the Makuhari Messe in Chiba, Japan.

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis Technologies has key product development centers in Beverly, Massachusetts, as well as in Saijo, Japan through its joint venture, SEN Corporation, an SHI and Axcelis Company. The company's Internet address is: www.axcelis.com.

Forward Looking Statements

This press release includes certain statements, known as "forward-looking statements," which express the current expectations of Axcelis management. Unanticipated product performance issues could cause actual results to differ materially from those currently anticipated as expressed in this press release. These risks and other risk factors relating to Axcelis are described more fully in the most recent Form 10-K filed by Axcelis and in other filings from time to time with the Securities and Exchange Commission.

CONTACT: Company Contact:
Axcelis Technologies, Inc.
Maureen Hart, +1-978-787-4266
Fax: +1-978-787-4275
maureen.hart@axcelis.com
or
Investor Contact:
Axcelis Technologies, Inc.
Steve Bassett, +1-978-787-4000
Fax: +1-978-787-9133
investor.relations@axcelis.com
or
Agency Contact:
Loomis Group
Heather Smith, +1-617-638-0022
Fax: +1-617-638-0033
smithh@loomisgroup.com

SOURCE: Axcelis Technologies, Inc.