Axcelis to Participate in ASMC 2026
- MUSIC to Reduce Defects and Improve Throughput on Implants for SiC MOSFETs
Presented by HC Jayashankar, ST Microelectronics
Coauthors:Bala Subbu ,Jaganathan Sampathkumar (ST Microelectronics);Leonard M. Rubin ,Wanchun Zhang ,James Thomas ,JunSheng Chan ,Dwight Roh ,Fulvio Mazzamuto (Axcelis Technologies )
- Analysis of Resistance Performance of High Dose Boron Doping
Presented by Bohesharvind N. Murthi,Infineon Technologies (Kulim) Pte. Ltd
Coauthors:Chea Hui Lee (Infineon Technologies);Hank Chen , WanChun Zhang ,Leonard M. Rubin (Axcelis Technologies )
"ASMC is an important forum for advancing manufacturing innovation," said
For more information on the event, visit the conference website at https://www.semi.org/en/connect/events/advanced-semiconductor-manufacturing-conference-asmc.
About
CONTACTS:
Investor Relations Contact:
Senior Vice President and Interim Chief Financial Officer
Telephone: (978) 787-2352
Email: David.Ryzhik@axcelis.com
Press/Media Relations Contact:
Senior Director,
Telephone: (978) 787-4266
Email: Maureen.Hart@axcelis.com
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