Axcelis to Present at D.A. Davidson & Co. Silicon Technology Conference 2005

February 28, 2005 at 10:16 AM EST

BEVERLY, Mass.--(BUSINESS WIRE)--Feb. 28, 2005--Axcelis Technologies, Inc. (NASDAQ: ACLS) is pleased to announce that Donald Palette, vice president and controller, and James Kawski, director of investor relations and corporate development, will be presenting at the D.A. Davidson & Co. Silicon Technology Conference 2005. This year's conference will be held March 3-4, 2005, at the Grand Summit Resort Hotel and Conference Center in Park City, Utah.

Palette and Kawski will present on Friday, March 4 at 11:30-12:20 MT. For those who cannot attend, the presentation will be available via live Webcast and archived for 30 days, accessible on the Axcelis Web site at www.axcelis.com.

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis Technologies has key product development centers in Beverly, Massachusetts, as well as in Toyo, Japan through its joint venture, SEN. The company's Internet address is: www.axcelis.com.


    CONTACT: Company Contact:
             Axcelis Technologies, Inc.
             Maureen Hart, 978-787-4266
             maureen.hart@axcelis.com
             or
             Investor Contact:
             Axcelis Technologies, Inc.
             James Kawski, 978-787-4000
             investor.relations@axcelis.com
             or
             Agency Contact:
             Loomis Group
             Stacy Grisinger, 617-638-0022
             grisingers@loomisgroup.com

    SOURCE: Axcelis Technologies, Inc.