Axcelis Secures Multiple Orders for New Generation of Ultra Low Energy, High Current Implanters

BEVERLY, Mass.--(BUSINESS WIRE)--Sept. 8, 2004-- Axcelis Technologies, Inc. (NASDAQ: ACLS) has received another round of orders for its Ultra(TM) line of ion implanters from semiconductor manufacturers in the United States, Europe, Taiwan and Singapore. Valued at approximately $20 million, the new orders are for the latest generation of the market-winning Ultra high current, low energy implant platform, which Axcelis introduced in July.

The new orders include several 300mm systems. Some tools have already begun shipping, while others are scheduled for installation later this year and in early 2005.

"We believe the Ultra is in demand at fabs worldwide because it is the only system available that brings the right mix of low energy performance and productivity to high volume production lines," said Mike Luttati, chief operating officer of Axcelis. "Our latest enhancements to the Ultra platform make it possible for our customers to leverage their investments in earlier Ultra models by upgrading their systems based on their specific needs. This capability gives users even greater flexibility in their fab operations."

Axcelis credits the Ultra's continued market success to the patented electron confinement technology found at the heart of the multi-wafer platform. The technology increases the efficiency of the Ultra's low energy beamline, enabling customers to improve process throughput by as much as 20 percent. Moreover, the combination of the Ultra's electron confinement technology and multi-wafer platform allows users to spend less time tuning beams and handling wafers. The resulting increase in productivity gives users a competitive advantage when manufacturing ultra shallow junctions and other shallow-depth structures found in advanced semiconductor devices.

Since Axcelis launched the Ultra high current implant family two years ago, more than 75 systems have been installed worldwide and Axcelis has regained the top spot in the high current implant market. According to market researcher Gartner Dataquest, Axcelis and its joint venture Sumitomo Eaton Nova held 43.8% of the high current implant market last year, up from 35.3% in 2002.

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis Technologies has key technology centers in Beverly, Massachusetts, and Rockville, Maryland as well as in Toyo, Japan through its joint venture, SEN. The company's Internet address is: www.axcelis.com.

Forward-Looking Statements

This press release includes certain statements, known as "forward-looking statements," which express the current expectations of Axcelis management. Certain risks and uncertainties could cause actual results to differ materially from those currently anticipated as expressed in this press release. Among other factors, such risks and uncertainties include the continuing demand for semiconductor equipment, relative market growth, continuity of business relationships with major customers, competitive pressure on sales and pricing, increases in material and other production costs that cannot be recouped in product pricing and global economic and financial conditions. These risks and other risk factors relating to Axcelis are described more fully in the most recent Form 10-K filed by Axcelis and in other filings from time to time with the Securities and Exchange Commission.

CONTACT:
Company Contact:
Axcelis Technologies, Inc.
David Snyder, 978-787-4273
david.snyder@axcelis.com

Investor Contact:
Axcelis Technologies, Inc.
Jim Kawski, 978-787-4000
investor.relations@axcelis.com

Agency Contact:
Loomis Group
Stacy Grisinger, 617-638-0022
grisingers@loomisgroup.com