Axcelis Technologies Names Gerald Cox Fellow

February 9, 2004 at 8:04 AM EST
Five others recognized in Distinguished Technologists Program

BEVERLY, Mass.--(BUSINESS WIRE)--Feb. 9, 2004-- Axcelis Technologies, Inc. (NASDAQ: ACLS) announced today that Gerald Cox has been named an Axcelis Fellow, the highest technical award and accolade within the company. The Axcelis Fellows and Distinguished Technologists program was created to recognize the achievements and contributions of exceptional scientists at Axcelis. The company is also pleased to recognize the outstanding efforts of Aditya Agarwal, Ivan (Skip) Berry, Dennis Kamenista, Kourosh Saadatmand and Kevin W. Wenzel as Distinguished Technologists.

"We are especially proud to name Gerald Cox as the 2003 Axcelis Fellow," said John Poate, Axcelis' chief technology officer. "He is recognized internationally for his work on cleaning technologies for advanced semiconductor manufacturing and holds 17 patents in the areas of resist stripping and stabilization technologies.

"Cox and this year's five Distinguished Technologists have all provided impressive technical contributions to the company," Poate added. "Together, their achievements not only bolster our company's long-standing technology leadership position, but they also reinforce Axcelis' philosophy of customer success through service, support, training and process innovation."

Gerald Cox, director of engineering for Axcelis Curing and Cleaning Systems, is the third technologist to be named an Axcelis Fellow. Prior to joining the company, he held various senior technical and management positions, including chief operating officer at Matrix Integrated Systems and director of engineering at Fusion Systems.

Now in its third year, the Axcelis Fellows and Distinguished Technologists program involves a rigorous review process of individuals nominated by their peers. In evaluating award candidates, members of Axcelis' Roadmap Council and executive management team look for technologists who exhibit team leadership through mentoring, excellence in customer service and commitment to innovation.

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis Technologies has key technology centers in Beverly, Massachusetts, and Rockville, Maryland as well as in Toyo, Japan through its joint venture, SEN. The company's Internet address is: www.axcelis.com.

CONTACT: Company Contact:
Axcelis Technologies, Inc.
Maureen Hart, 978-787-4266
Fax: 978-787-4275
maureen.hart@axcelis.com

Investor Contact:
Axcelis Technologies, Inc.
Mark Namaroff, 978-787-4000
Fax: 978-787-9133
investor.relations@axcelis.com

Agency Contact:
Loomis Group
Stacy Grisinger,617-638-0022
Fax: 617-638 0033
grisingers@loomisgroup.com