Axcelis Technologies to Present at the 5th Annual Needham Growth Conference

January 8, 2003 at 8:10 AM EST

BEVERLY, Mass.--(BUSINESS WIRE)--Jan. 8, 2003--Axcelis Technologies, Inc. (NASDAQ: ACLS), is pleased to announce that Neil Moses, executive vice president and chief financial officer, and Mark Namaroff, director of strategic planning and investor relations, will be presenting at the 5th Annual Needham Growth Conference. This year's conference is being held January 7 through January 9, 2003 at the New York Palace Hotel in New York, N.Y.

Moses and Namaroff will present on Thursday, January 9 at 11:00 a.m. EST. For those who cannot be present at the conference, the presentation will be available via live webcast and archived for 30 days, accessible on our Web site at www.axcelis.com.

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis Technologies has key technology centers in Beverly, Massachusetts, and Rockville, Maryland as well as in Toyo, Japan through its joint venture, SEN. The company's Internet address is: www.axcelis.com.

CONTACT:

Axcelis Technologies, Inc.
Maureen Hart, 978/787-4273
maureenhart@axcelis.com
or
Axcelis Technologies, Inc. (Investor Contact)
Mark Namaroff, 978/787-4000
investor.relations@axcelis.com
or
Loomis Group (Agency Contact)
Stacy Grisinger, 617/638-0022
grisingers@loomisgroup.com