Axcelis Technologies to Present At the Fourth Annual Needham Growth Conference

BEVERLY, Mass., Jan 7, 2002 (BUSINESS WIRE) -- Axcelis Technologies, Inc. (Nasdaq: ACLS), is pleased to announce that Neil Moses, Executive Vice President and Chief Financial Officer, will be presenting at the Fourth Annual Needham Growth Conference. This year's conference will be held January 8 - January 10, 2002 at the New York Palace Hotel, 455 Madison Ave., New York, NY.

Mr. Moses will be presenting on Wednesday, January 9th at 2:00 pm EST. For those who cannot be present at the conference, the presentation will be available via live webcast and archived for 60 days, accessible on our website at www.axcelis.com or directly at the following address: http://www.twst.com/econf/mm/needham/acls.html

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis Technologies has key technology centers in Beverly, Massachusetts, and Rockville, Maryland as well as in Toyo, Japan through its joint venture, SEN. The company's Internet address is: www.axcelis.com.

CONTACT:
Company Contact:
Maureen Hart
Axcelis Technologies, Inc.
Tel: (978) 787-4266
maureen.hart@axcelis.com
or
Investor Contact:
Mark Namaroff
Axcelis Technologies, Inc.
Tel: (978) 787-4000
investor.relations@axcelis.com
or
Agency Contact:
Dave Snyder
The Loomis Group Inc.
Tel: (617) 638-0022
snyderd@loomisgroup.com