Axcelis Technologies to Present At the Lehman Brothers Semiconductor and Computer Systems Conference

November 15, 2002 at 9:03 AM EST

BEVERLY, Mass.--(BUSINESS WIRE)--Nov. 15, 2002--Axcelis Technologies, Inc. (Nasdaq: ACLS), is pleased to announce that Mike Luttati, executive vice president and chief operating officer, and Kevin Bisson, vice president and controller, will be presenting at the Lehman Brothers Semiconductor and Computer Systems Conference. This year's conference will be held November 18 through November 21, 2002 at the Palace Hotel in San Francisco, CA.

Mr. Luttati and Mr. Bisson will be presenting on Monday, November 18 at 1:00 p.m. EST. For those who cannot be present at the conference, the presentation will be available via live Webcast and archived for 30 days, accessible on our Web site at www.axcelis.com.

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis Technologies has key technology centers in Beverly, Massachusetts, and Rockville, Maryland as well as in Toyo, Japan through its joint venture, SEN. The company's Internet address is: www.axcelis.com.

CONTACT:

Axcelis Technologies, Inc.
Maureen Hart, 978/787-4266
maureen.hart@axcelis.com
or
Axcelis Technologies, Inc. (Investor Contact)
Mark Namaroff, 978/787-4000
investor.relations@axcelis.com
or
Loomis Group
Stacy Grisinger, 617/638-0022
grisingers@loomisgroup.com