Axcelis Technologies to Present at Morgan Stanley Semiconductor & Systems Conference

Morgan Stanley Semiconductor & Systems Conference

BEVERLY, Mass.--(BUSINESS WIRE)--March 4, 2003--Axcelis Technologies, Inc. (Nasdaq: ACLS), is pleased to announce that Mary Puma, president and chief executive officer, and Neil Moses, executive vice president and chief financial officer, will be presenting at the Morgan Stanley Semiconductor & Systems Conference. This year's conference will be held March 3 through March 5, 2003 at the St. Regis Monarch Beach Resort and Spa in Dana Point, Calif.

Puma and Moses will present on Wednesday, March 5 at 10:00 a.m. PST (1:00 p.m. EST). For those who cannot be present at the conference, the presentation will be available via live Webcast and archived for 30 days, accessible on the Axcelis Web site at www.axcelis.com.

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis Technologies has key technology centers in Beverly, Massachusetts, and Rockville, Maryland as well as in Toyo, Japan through its joint venture, SEN. The company's Internet address is: www.axcelis.com.

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