Axcelis Technologies to Present at the Morgan Stanley Semiconductor and Systems Conference 2004

February 25, 2004 at 11:55 AM EST

BEVERLY, Mass.--(BUSINESS WIRE)--Feb. 25, 2004--Axcelis Technologies, Inc. (Nasdaq: ACLS), is pleased to announce that Mary Puma, president and CEO, and Mark Namaroff, director of investor relations and corporate development, will be presenting at the Morgan Stanley Semiconductor & Systems Conference 2004. This year's conference will be held March 1-3, 2004, at the St. Regis Monarch Beach Resort in Dana Point, California.

Puma and Namaroff will be presenting on Wednesday, March 3 at 8:45 a.m. PT. For those who cannot attend, the presentation will be available via live Webcast and archived for 30 days, accessible on the Axcelis Web site at www.axcelis.com.

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis Technologies has key technology centers in Beverly, Massachusetts, and Rockville, Maryland as well as in Toyo, Japan through its joint venture, SEN. The company's Internet address is: www.axcelis.com.

CONTACT: Axcelis Technologies, Inc.
Company Contact:
David Snyder, 978-787-4273
david.snyder@axcelis.com

Investor Contact:
Mark Namaroff, 978-787-4000
investor.relations@axcelis.com

Loomis Group
Agency Contact:
Stacy Grisinger, 617-638-0022
grisingers@loomisgroup.com