Axcelis Technologies to Present at the Sixth Annual Needham Growth Conference

December 19, 2003 at 8:02 AM EST

BEVERLY, Mass., Dec 19, 2003 (BUSINESS WIRE) -- Axcelis Technologies, Inc. (Nasdaq: ACLS) is pleased to announce that Mary Puma, president and CEO, and Stephen Bassett, CFO, will be presenting at the Sixth Annual Needham Growth Conference. This year's conference will be held January 6-9 at The New York Palace Hotel in New York, New York.

Puma and Bassett will be presenting on Tuesday, January 6 at 4:30 p.m. EST. For those who cannot be present at the conference, the presentation will be available via live webcast and archived for 30 days, accessible on our web site at www.axcelis.com.

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis Technologies has key technology centers in Beverly, Massachusetts, and Rockville, Maryland as well as in Toyo, Japan through its joint venture, SEN. The company's Internet address is: www.axcelis.com.

Axcelis Technologies, Inc.
Maureen Hart, 978-787-4266
maureen.hart@axcelis.com

Mark Namaroff (Investor Contact)
978-787-4000
investor.relations@axcelis.com

The Loomis Group
Stacy Grisinger, 617-638-0022
grisingers@loomisgroup.com