Axcelis Wins 2007 Top Supplier Award from Hitachi Semiconductor Singapore

April 10, 2007 at 7:51 AM EDT

Scores Highest for Superior Technology, Customer Service and Value

BEVERLY, Mass.--(BUSINESS WIRE)--April 10, 2007--Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced it has been presented with the 2007 Supplier Excellence Award from Hitachi Semiconductor Singapore Pte. Ltd. Axcelis earned top honors in all judging categories including product technology, system quality, customer service and cost.

Hitachi Semiconductor Singapore serves a wide range of markets including high-end computing, wireless communications, consumer and automotive. The company has been an Axcelis customer for seven years and utilizes a large number of Axcelis' high dose and high energy ion implanters for advanced DRAM, Flash and logic chip production.

"Axcelis is thrilled to be acknowledged with top honors from Hitachi Semiconductor Singapore," said Eric Hsu, vice president of Asia customer operations. "Hitachi is a leader in flexible, market-responsive chipmaking, and we're proud that the application and service support from our Singapore team combined with the performance of our equipment can help them reach their goals."

Axcelis' comprehensive portfolio of ion implanters includes single and multi wafer tools for high dose, mid dose and high energy applications. These systems cover every critical implant application including all existing and emerging needs of the 45nm era and beyond.

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis also licenses its 50% owned joint venture, SEN Corporation, an SHI and Axcelis Company, to manufacture and sell certain implant products in Japan. The company's Internet address is: www.axcelis.com.

CONTACT: Company Contact:
Axcelis Technologies, Inc.
David Snyder, +1-978-787-4273
david.snyder@axcelis.com
or
Investor Contact:
Axcelis Technologies, Inc.
Steve Bassett, +1-978-787-4000
investor.relations@axcelis.com
or
Agency Contact:
Loomis Group
Heather Smith, +1-617-309-8005
smithh@loomisgroup.com
SOURCE: Axcelis Technologies, Inc.