Axcelis Wins Follow-On Order for Optima HD High Dose Implanter from Major Asian Memory Chipmaker
BEVERLY, Mass., Jan 18, 2007 (BUSINESS WIRE) -- Axcelis Technologies, Inc. (NASDAQ: ACLS) has received a follow-on order for its Optima HD high dose ion implanter from one of the world's largest manufacturers of memory devices. This latest win builds on orders placed last year by this same customer for a standard Optima HD as well as an Optima HD Imax(TM) molecular implanter. The Optima HD is the only implanter that addresses traditional high dose implants as well as the expanding range of applications in sub-65nm device manufacturing. The system will ship during the first quarter of 2007.
"This new order further emphasizes our customer's commitment to Axcelis' Optima HD technology and the strength of our partnership with this major global chipmaker," said Mary Puma, chairman and CEO of Axcelis. "The Optima HD incorporates our propriety spot beam technology, which because of its short, simple beam delivers greater productivity, higher yield and unmatched extendibility. The Optima HD, which is in production, has now been validated as the clear choice over competing technologies for this customer's leading-edge device manufacturing needs."
The Optima HD covers all traditional high dose implants while providing significant mid dose applications overlap for maximum versatility and capital efficiency. The Optima HD delivers precise implants using Axcelis' advanced spot beam technology, resulting in exceptional implant uniformity and repeatability. Axcelis' proprietary RadiusScan(TM) endstation further enhances productivity and enables the system to cover an extremely broad dose range.
About Axcelis Technologies, Inc.
Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis Technologies also licenses its 50% owned joint venture, SEN Corporation, an SHI and Axcelis Company, to manufacture and sell certain implant products in Japan. The company's Internet address is: www.axcelis.com
SOURCE: Axcelis Technologies, Inc.
Company Contact:
Axcelis Technologies, Inc.
David Snyder, +1-978-787-4273
Fax: +1-978-787 4275
david.snyder@axcelis.com
or
Investor Contact:
Axcelis Technologies, Inc.
Stephen Bassett, +1-978-787-4000
Fax: +1-978-787-9133
investor.relations@axcelis.com
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Agency Contact:
Loomis Group
Heather Smith, +1-617-638-0022
Fax: +1-617-638-0033
smithh@loomisgroup.com
