Axcelis Wins Multiple Orders for Film Curing and Charge Erase Systems from Major Asian Memory Chipmaker

RapidCure FC and RapidCure CE deliver unmatched flexibility in meeting growing production demands for next-generation devicesBEVERLY, Mass., Feb 15, 2007 (BUSINESS WIRE) -- Axcelis Technologies, Inc. (NASDAQ: ACLS) today reported it has won multiple orders for both its RapidCure FC film curing and RapidCure CE charge erase systems from a major Asian memory chipmaker. Axcelis' RapidCure family of advanced UV curing products provides enabling technology for a wide variety of established and emerging applications in sub-65nm device manufacturing. The RapidCure FC and CE systems will ship in the first quarter of 2007 and will be installed in multiple fabs in Asia.

"Our customer's multiple system order is powerful validation of Axcelis' proprietary UV curing technology and speaks volumes about its value for next-generation device development," said Mary Puma, chairman and CEO of Axcelis. "Axcelis has been at the forefront of UV curing technology for over two decades. Our RapidCure product line, with its application-specific, microwave-driven UV light source, incorporates winning technologies that deliver significant competitive advantages to our valued customers."

Axcelis' RapidCure FC film curing system is designed for enhancing and/or modifying mechanical and electrical properties of advanced semiconductor dielectric films. It is ideally suited for many of today's most sophisticated UV-based applications, including low-k and silicon nitride film curing, and charge neutralization.

Axcelis' RapidCure CE is the fastest and most flexible charge erase technology on the market for removing accumulated charge in devices. It cuts erase times up to a factor of 10X and delivers a more complete erase than many conventional UV erase products. This enhanced capability enables makers of flash and other non-volatile memory chips to significantly increase fab productivity and reduce operating costs.

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis Technologies also licenses its 50% owned joint venture, SEN Corporation, an SHI and Axcelis Company, to manufacture and sell certain implant products in Japan. The company's Internet address is: www.axcelis.com

SOURCE: Axcelis Technologies, Inc.

Company Contact:
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Maureen Hart, +1-978-787-4266
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