Chartered Selects Axcelis' Ion Implanters for First 300mm Fab

BEVERLY, Mass.--(BUSINESS WIRE)--March 25, 2004-- Axcelis Technologies, Inc. (NASDAQ: ACLS) today announced that Chartered Semiconductor Manufacturing (Nasdaq: CHRT and SGX-ST: Chartered), one of the world's top three dedicated semiconductor foundries, will install the Company's HC3 Ultra high-current and HE3 high-energy ion implanters for supporting 0.13-micron and 90-nanometer (nm) CMOS semiconductor manufacturing processes at Chartered's first 300-millimeter (mm) fab, Fab 7.

"This is an exciting time to be collaborating with Chartered, who is at the industry forefront implementing next-generation technology solutions," said Mike Luttati, chief operating officer of Axcelis. "We are pleased that Chartered has chosen Axcelis' leading-edge implanters for optimizing tool productivity and realizing low cost of ownership at its first 300mm facility."

"As Chartered advances into 300mm wafer fabrication starting with 90nm production, achieving 'first-time success' remains a top priority," said Kay Chai "KC" Ang, senior vice president of fab operations at Chartered. "We are pleased to collaborate with Axcelis to drive manufacturing productivity as we begin operations at our 300mm facility."

Axcelis continues to gain broad market acceptance for its HC3 Ultra low-energy, high-current and HE3 high-energy implanters. Both systems are known throughout the industry for their exceptional productivity and low cost of ownership. Since its introduction in 2002, the Ultra line has consistently demonstrated better productivity than competing systems in numerous head-to-head evaluations conducted by customers around the globe. The company's high-energy platform has garnered greater than 80% market share for the past five years, with more than 300 high-energy systems installed worldwide.

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis Technologies has key technology centers in Beverly, Massachusetts, and Rockville, Maryland as well as in Toyo, Japan through its joint venture, SEN. The company's Internet address is: www.axcelis.com.

Forward-Looking Statements

This press release includes certain statements, known as "forward-looking statements," which express the current expectations of Axcelis management. Certain risks and uncertainties could cause actual results to differ materially from those currently anticipated as expressed in this press release. Among other factors, such risks and uncertainties include the continuing demand for semiconductor equipment, relative market growth, continuity of business relationships with major customers, competitive pressure on sales and pricing, increases in material and other production costs that cannot be recouped in product pricing and global economic and financial conditions. These risks and other risk factors relating to Axcelis are described more fully in the most recent Form 10-K filed by Axcelis and in other filings from time to time with the Securities and Exchange Commission.

CONTACT:
Company Contact:
Axcelis Technologies, Inc.
David Snyder
978-787 4273
Fax: 978-787-4275
david.snyder@axcelis.com
or
Investor Contact:
Axcelis Technologies, Inc.
Mark Namaroff
978-787 4000
Fax: 978-787-9133
investor.relations@axcelis.com
or
Agency Contact:
Loomis Group
Stacy Grisinger, 617-638 0022
Fax: 617-638-0033
grisingers@loomisgroup.com