Court Sets Trial Date in Axcelis Patent Infringement Suit Vs. Applied Materials

BEVERLY, Mass.--(BUSINESS WIRE)--Jan. 15, 2003--Axcelis Technologies, Inc. (NASDAQ: ACLS) today reported that the Federal District Court for the District of Massachusetts has set a trial date of May 12, 2003 in Axcelis' pending patent infringement suit against Applied Materials. The Court also stated that pending summary judgement motions will be resolved beginning in March. Axcelis expects that this process will narrow the issues for trial.

"We are very pleased to have a specific trial date," said Mary Puma, Axcelis' president and CEO. "This case has been pending for more than two years and we look forward to having the infringement issue resolved in the first half of 2003."

Axcelis filed suit against Applied in January 2001 in the United District Court for the District of Massachusetts. The suit charges that Applied is using Axcelis' patented technology unlawfully. Specifically, Axcelis charges that Applied's medium current/high energy ion implanter machine, known as the 'Swift', infringes an Axcelis patent relating to the use of radio frequency linear accelerator ("rf LINAC") technology in ion implantation equipment.

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis Technologies has key technology centers in Beverly, Massachusetts, and Rockville, Maryland as well as in Toyo, Japan through its joint venture, SEN. The company's Internet address is: www.axcelis.com.

Safe Harbor Statement

The statement above on Axcelis' expectation for the outcome of this litigation is a forward-looking statement under the SEC safe harbor provisions. As such, it is subject to various risks and uncertainties, including Court and jury determinations of law and facts. These risks and other risk factors relating to Axcelis are described more fully in the most recent Form 10-Q filed by Axcelis and in other documents filed from time to time with the Securities and Exchange Commission.

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