Major Fab Signs Service Agreement With Axcelis Valued At Greater Than $30M; Global Service Solutions to Provide Complete On-Site Support for Axcelis' 300mm Equipment Suite

BEVERLY, Mass., Jan 30, 2002 (BUSINESS WIRE) -- In a program designed to maximize equipment performance, Axcelis Technologies, Inc. (NASDAQ: ACLS), today announced that a major North American chipmaker has signed a long-term equipment support agreement with its Global Service Solutions organization. Under the agreement, valued in excess of $30 million, Axcelis will provide complete on-site management of all service and support for its suite of ion implant, dry strip and rapid thermal processing systems at the customer's new 300mm fab.

"This type of outsourcing arrangement exemplifies the value that customers are placing on our Support organization. As chipmakers focus resources on 300mm process improvements, they seek suppliers who not only deliver exceptional equipment, but also provide complete service solutions to ensure tools continuously run at optimal performance," said Ted Miller, vice president and general manager of Axcelis Global Service Solutions. "This comprehensive approach is the foundation of all Axcelis 300mm products - we believe our combination of innovative tools and state-of-the-art support programs is essential to delivering maximum equipment utilization and lowest cost of ownership for our customers."

Global Service Solutions is a key component in Axcelis' ongoing commitment to total customer success. The multi-year contract provides comprehensive 24-hour service and support seven days a week, and includes all spare parts and consumables required to keep tools operating at peak performance. As part of the contract, Axcelis will have full accountability for equipment performance, which will be tracked and continuously improved through Axcelis' IntegraNET equipment networking platform. Data from IntegraNET may then be analyzed by Axcelis' world class support team to yield a ProductivityPlus(TM) advantage aimed at increasing tool uptime, process optimization and reducing operating expenses year to year.

"With the changing economics of fab operations, customers are seeing the value-add of equipment suppliers who can deliver a complete solution to the manufacturing floor," said Mary Puma, president and chief executive officer for Axcelis. "As a supplier of record for this new 300mm fab, Axcelis understands the benefits of optimal equipment performance before, during and after production ramp-up. By having a dedicated Axcelis service team in-house from day one, our customer can leverage our experience and knowledge to improve operating efficiencies."

On-site service and support will begin in the first quarter of 2002, in parallel with equipment installation.

    About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis Technologies has key technology centers in Beverly, Massachusetts, and Rockville, Maryland as well as in Toyo, Japan through its joint venture, SEN. The company's Internet address is: www.axcelis.com.

CONTACT:          Company Contact:                    
                  Maureen Hart                        
                  Axcelis Technologies, Inc.          
                  Tel:  (978) 787 4266                
                  maureen.hart@axcelis.com            
                  or
                  Investor Contact:                   
                  Mark Namaroff                       
                  Axcelis Technologies, Inc.          
                  Tel: (978) 787 4000                 
                  investor.relations@axcelis.com      
                  or
                  Agency Contact:           
                  Dave Snyder               
                  Loomis Group              
                  Tel:  (617) 638 0022      
                  snyderd@loomisgroup.com   

URL:              http://www.businesswire.com
Today's News On The Net - Business Wire's full file on the Internet
with Hyperlinks to your home page.

Copyright (C) 2002 Business Wire.  All rights reserved.