New Infineon-Nanya Joint Venture Places $18 Million Order for Suite of Axcelis Ion Implanters

    BEVERLY, Mass.--(BUSINESS WIRE)--Sept. 11, 2003--

    Inotera Memories JV selects HE3 and HC3 Ultra systems to equip
                            first 300mm fab

Axcelis Technologies Inc. (NASDAQ: ACLS), has secured an $18 million dollar ion implant order from Inotera Memories, a new 300mm DRAM joint venture between Infineon Technologies AG and Nanya Technology Corp. The order includes multiple HE3 systems for well and channel implants and multiple HC3 Ultra systems for volume production of advanced transistor structures.

The multi-wafer systems will begin shipping in November to Inotera's 300mm fab in Taiwan, where they will support advanced memory device production. Inotera chose the systems as part of its initial tool procurement for the new fab, which is expected to begin production in the first quarter of 2004.

"Axcelis' multi-wafer implant platforms are known throughout the industry for delivering the highest levels of productivity and excellent cost of ownership," said Mike Luttati, executive vice president and chief operating officer of Axcelis. "These are key factors when ramping a new fab, and as such were the dominant reasons Axcelis was chosen to support the fab's high-energy and high-current implant processes. These two platforms provide customers with the capabilities to produce cost-effective products today and well into the future."

Luttati also noted that Inotera is one of a handful of companies readying new fab capacity around the world. "This is a healthy sign for our market. As a matter of operational strategy, Axcelis has long been prepared to support new fab activities throughout the industry, and we're proud to play a role in the launch of this new DRAM operation."

Axcelis has gained wide market acceptance with its HE3 high-energy implanter and HC3 Ultra low-energy, high current implanter. Both systems have won accolades throughout the industry for their exceptional productivity and low cost of ownership. Since its introduction last year, the Ultra line has consistently demonstrated better productivity than competing single-wafer and multi-wafer systems in numerous head-to-head evaluations conducted by customers around the globe. The company's high-energy platform has garnered greater than 80% market share for the past five years, with more than 300 high-energy systems installed worldwide.

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis Technologies has key technology centers in Beverly, Massachusetts, and Rockville, Maryland as well as in Toyo, Japan through its joint venture, SEN. The company's Internet address is: www.axcelis.com.

Forward-Looking Statements

This press release includes certain statements, known as "forward-looking statements," which express the current expectations of Axcelis management. Certain risks and uncertainties could cause actual results to differ materially from those currently anticipated as expressed in this press release. Among other factors, such risks and uncertainties include the continuing demand for semiconductor equipment, relative market growth, continuity of business relationships with major customers, competitive pressure on sales and pricing, increases in material and other production costs that cannot be recouped in product pricing and global economic and financial conditions. These risks and other risk factors relating to Axcelis are described more fully in the most recent Form 10-K filed by Axcelis and in other filings from time to time with the Securities and Exchange Commission.

    CONTACT: Company Contact:
             Axcelis Technologies, Inc.
             Maureen Hart, 978-787-4266
             maureen.hart@axcelis.com
             or
             Investor Contact:
             Axcelis Technologies, Inc.
             Mark Namaroff, 978-787-4000
             investor.relations@axcelis.com
             or
             Agency Contact:
             Loomis Group
             Stacy Grisinger, 617-638-0022
             grisingers@loomisgroup.com

    SOURCE: Axcelis Technologies, Inc.