June 23, 2022 at 8:00 AM EDT

Axcelis' Leadership in the Power Device Segment Continues to Expand

BEVERLY, Mass., June 23, 2022 /PRNewswire/ -- Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, today announced multiple shipments of the Company's Purion H200 Si 200mm and SiC Power Series™ 150mm high current implanters to leading power device chipmakers. The shipments, which included two new penetrations and a follow-on order, went to fabs located in Asia. These customers will use the systems in high volume production of power devices supporting automotive device markets.

The Purion H200 is the first and only single wafer high current implanter designed to cover all high dose implant applications from energies as low as 5keV to a maximum of 200keV, and is especially suited to foundry and power device manufacturers’ needs.

Executive Vice President of Product Development, Bill Bintz, commented, "Axcelis is committed to delivering best in class solutions that support the global adoption of EV technology, which is one of the fastest growing segments in IC manufacturing. Increasing automotive power device content is fueling particularly high growth in the power market. The Purion product portfolio is uniquely positioned to cover all current and emerging implant applications for this market segment. In 2022 we expect the power device segment to account for between 30% and 40% of our systems sales, and we expect continued growth in this segment."

About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for 40 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at

Maureen Hart (editorial/media) 978.787.4266
Doug Lawson (investor relations) 978.787.9552

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SOURCE Axcelis Technologies, Inc.