Axcelis Announces Participation In SEMICON Japan 2021
Semiconductor manufacturers are invited to visit the
- Purion Series - The platform is designed with unique enabling technologies to deliver the highest purity, precision and productivity to meet the needs of today's most demanding High Current, Medium Current and High Energy applications. This includes the Purion Power Series™ - featuring
Axcelis'innovative solution for both silicon and silicon carbide (SiC) processing across the full power device applications space.
- GSD Ovation Series - Based on the highly successful GSD Series of implanters, the industry benchmark for the longest manufactured and supported batch ion implanter, the new GSD Ovation high current and high energy systems are designed to support the growing 200mm new fab construction and expansion activity. Innovative improvements, combined with a proactive continuous improvement roadmap, enables the fastest and most cost effective way to extend, optimize and sustain robust capability, while delivering unmatched reliability and lowest cost of ownership.
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