AXCELIS ANNOUNCES PARTICIPATION IN SEMICON JAPAN 2022
Showcase Features the Purion and GSD Ovation Series of Ion Implanters Designed to Meet the Emerging Needs of Power Device, Image Sensor, Memory and Logic Markets
Semiconductor manufacturers are invited to visit the
- Purion Power Series™ - Featuring Axcelis' innovative solution for both silicon and silicon carbide (SiC) processing across the full power device applications space.
- Purion H™ Series - Including the new Purion H5™, the Purion H200™ and the Purion Dragon™, all designed to provide a comprehensive solution for high current implants.
- Purion XE™ Series - Including the new Purion XEmax™, is the industry leading high energy implant platform, featuring patented Boost Technology™, designed for the most advanced image sensor applications up to 15MeV.
- Purion M™ Series - Offering the broadest spectrum of mid-current doses available, enabling unparalleled flexibility to meet today's evolving implant requirements.
- GSD Ovation™ - Providing the most cost-effective way to extend high current and high energy batch platform capability with the highest reliability, serviceability and lowest CoO.
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