AXCELIS ANNOUNCES PARTICIPATION IN SEMICON KOREA 2022
- Purion H™ Series - Including the new Purion H5™, the Purion H200™ and the Purion Dragon™, all designed to provide a comprehensive solution for high current implant applications.
- Purion XE™ Series - Including the new Purion XEmax™, is the industry leading high energy implant platform, featuring patented Boost Technology™, designed for the most advanced applications up to 15MeV.
- GSD Ovation™ - Offering the fastest, most cost effective way to extend high current and high energy batch platform capability with the highest reliability, serviceability and lowest CoO.
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