Axcelis Optima HD (TM) High Dose Implanter Approved as Tool of Record At SMIC
"We're very pleased that the addition of the Optima HD high dose implanter further strengthens our relationship with SMIC," said Mary Puma, chairman and CEO of Axcelis. "The Optima HD has demonstrated its exceptional process capabilities as well as met the exacting demands of advanced foundry process flows."
The Optima HD covers all traditional and emerging high dose applications providing significant throughput advantages. The Optima HD delivers precise, repeatable implants using Axcelis' advanced spot beam technology. In addition, the Optima HD's proprietary RadiusScan(tm) endstation enables the system to cover an extremely broad dose range for optimized flexibility.
About Axcelis
Axcelis Technologies, Inc. (Nasdaq:ACLS) headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life support of ion implantation and cleaning systems. The company's Internet address is: www.axcelis.com.
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SOURCE: Axcelis Technologies, Inc.
Axcelis Technologies, Inc. Editorial/Media Maureen Hart 978.787.4266 Maureen.hart@axcelis.com Financial Community Stephen Bassett 978.787.4000 Investor.relations@axcelis.com