Axcelis Receives Order For Optima HDx High Current Implanter From Leading Foundry
"We're pleased to be able to offer our customers the industry's most advanced ion source technology," said
The Optima HDx high current implanter provides solutions for device manufacturers' highest dose requirements with the versatility and extendibility to provide solutions beyond today's 2Xnm technology node. The Optima HDx includes the industry's most advanced ion source technology, coupled with
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