Axcelis Ships Purion H200™ High Current Implanter To A Second Leading Power Device Manufacturer
Executive Vice President of Product Development,
The Purion H200
The Purion H200 is the first and only single wafer high current implanter designed to cover all high dose implant applications from energies as low as 5keV to a maximum of 200keV, and is especially suited to foundry and power device manufacturers' needs. Built upon the industry-proven Purion H high current beamline with its unique scanned spot beam architecture, the Purion H200 delivers the productivity of high current tools with the precision and accuracy of medium current implanters.
View original content to download multimedia:http://www.prnewswire.com/news-releases/axcelis-ships-purion-h200-high-current-implanter-to-a-second-leading-power-device-manufacturer-301219903.html