Annual Meeting Info

The 2024 annual meeting of the stockholders of Axcelis Technologies, Inc., a Delaware corporation, will be held at the offices of the Company at 108 Cherry Hill Drive, Beverly, Massachusetts, at 11:00 a.m. on Thursday, May 9, 2024.



As an Axcelis stockholder, you can receive future Axcelis proxy statements, annual reports to stockholders, and related proxy materials via electronic delivery, rather than receiving hard copies in the mail. Choosing to receive your future proxy materials online will save us the cost of producing and mailing documents to you and help conserve natural resources.

Click here for Electronic Delivery Enrollment